Preheating and Preprocessing Methods for Graphite Boats

Graphite boats, also known as graphite molds, are carriers that hold raw materials and components for high-temperature sintering and shaping. Widely used in various industries, proper usage, especially during preheating and preprocessing, is crucial for optimal performance. Here are some key points and methods for reference.

Preheating Methods for Graphite Boats

Inspection and Drying:

1. Ensure the graphite boats are thoroughly dried.
2. Conduct inspections for any damage by production, process, and equipment teams.
3. Once confirmed undamaged, proceed to preheat the graphite boats.

Preheating Process:

1. Place the dried graphite boats in a spare furnace tube for preheating.
2. Do not place silicon wafers inside the graphite boats during preheating.
3. Manually open the vacuum pump valve for the furnace tube being used for preheating. No specific processing is required during this stage.