Graphite Boat Loading and Unloading Chambers

Graphite Boat Loading Chamber

The graphite boat loading chamber is crucial in the solar energy industry and PECVD (Plasma Enhanced Chemical Vapor Deposition) processes. It supports loading silicon wafers and preparing medium to high-efficiency filters to ensure that the air expelled meets purification standards.

Working Principle of Graphite Boat Loading Chamber:

1. Air Filtration: Air passes through high-efficiency filters.
2. Uniform Pressure Distribution: The filtered air is uniformly pressed into a damping layer.
3. Clean Airflow: The clean airflow is vertically and unidirectionally sent into the loading work area.
4. Maintained Cleanliness: Ensures the cleanliness of the work area meets process requirements.

Operational Process:

• Operators install silicon wafers onto the graphite boats in a clean environment.

Main Features of the Graphite Boat Loading Chamber:

1. Accurate Positioning: Accurately positions the graphite boat bearing plate cart.
2. Sturdy Construction: Entirely made of stainless steel, ensuring a robust and reliable structure.
3. High-Efficiency Filters: Utilizes three GK series high-efficiency air filters.
4. Adjustable Vehicle: PECVD transport vehicles can tilt up to 15 degrees or rotate 180 degrees.
5. Low Noise: Purification fans operate with noise levels below 50dB.
6. High Cleanliness Standards: Ensures the working area’s cleanliness meets the process requirement of class 100.

Graphite Boat Unloading Chamber

The unloading chamber is designed similarly to ensure that the processed silicon wafers can be unloaded in a clean environment, maintaining the high standards required by the solar energy and semiconductor industries.

Key Components and Features:

1. Stainless Steel Construction: Like the loading chamber, the unloading chamber is built with stainless steel for durability and reliability.
2. High-Efficiency Air Filtration: Equipped with high-efficiency filters to maintain a clean environment.
3. Precision Handling: Allows precise handling and positioning of graphite boats and silicon wafers during the unloading process.
4. Noise Reduction: Ensures a low noise operation environment.
5. Cleanliness Control: Maintains a cleanliness level that meets stringent industry standards.

Both chambers are designed to work together to ensure the silicon wafers are handled in an ultra-clean environment from loading through to unloading, which is critical for maintaining the integrity and performance of the wafers in solar panels and electronic devices.