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How to Treat the Surface of a Graphite Boat After Multiple Cleanings

After multiple uses and cleanings, the surface of a graphite boat and its silicon nitride layer can significantly affect the uniformity and lifespan of the entire graphite boat. Here are the steps to treat the surface after multiple cleanings:

  1. Identify Issues: When the graphite boat shows surface pitting after several uses and cleanings, it affects the product’s surface uniformity and the boat’s lifespan.
  2. Surface Polishing Treatment: To ensure effective use, it is necessary to perform surface polishing treatment after cleaning.
  3. Disassembly and Preparation: Send the dried and cooled graphite boat to the designated maintenance area for disassembly. Before polishing, use special tools to remove the process clips.
  4. Polishing Process: After disassembly, polish the surface of the graphite boat.
  5. Reassembly: Once polishing is complete, reattach the process clips, making sure to adjust for clip wear. If the clips are severely worn, they must be replaced.
  6. Final Steps: After completing the above steps, reassemble the graphite boat correctly and return it to the workshop for use.

These steps help maintain the graphite boat’s surface uniformity and extend its service life, ensuring consistent performance in high-temperature applications.

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